This is the well known technology, called as “Magic Mirror” or “Makyo Inspection system” to be able to inspect semiconductor wafer surface for latent damages. 

Appearance	Products Name：Model	Maker
	Mirror Surface Inspection System”MAKYO”:YS-100SP to 300SP For inspection of wafer surface, glass surface or many others Inspection size 4inch to 12inch	Yamashita Denso Corporation
	High Magnification Magic Mirror inspection system：YIS-50H To inspect damages of a surface of hard disk or some optical components	Yamashita Denso Corporation
	Automation for handling and inspection of defects：YIS-100SPA to 300SPA Automated inspecton system by image processing	Yamashita Denso Corporation
	Slip Finder：MATS/300HM Automated inspection of Slip lines	Yamashita Denso Corporation