“Aperture Shape Stage” is a series of stages with clear aperture on the center of moving table.
Aperture shape stages are suited for applications such as fine alignment of an optical device that transmits laser beam, ultra structure observation in combination with microscope and analytical equipment and precise mapping measurement, etc.

 

 

 

 

Various aperture sizes
 Various types from compact aperture type suitable for small devices and large aperture type for alignment of larger panels are available.

Applications

   •SPM, AFM
   •Microscope tables
   •Spectroscopic instruments
   •Semiconductor & FPD-related inspections
   •Photolithography systems, Exposure devices
   •Mapping measurements

Line Up

X axis

 

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Size
[mm]
PK1L60-030U 30 1 ±1 2800 60×70×16
PK1L45-100U 100 2 ±2 490 45×45×16
XY axes

 PK2H

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Size
[mm]
PK2H100-030U (X,Y)30 1 ±1 2500 100×100×25
PK2H130-030U (X,Y)30 1 ±1 1500 130×130×30
PK2H150-050U (X,Y)50 2 ±2 1200 150×150×30


PK2L

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Size
[mm]
PK2L100-080U (X,Y)80 2 ±2 530 100×100×30
PK2L64-100U (X,Y)100 2 ±2 300 64×64×30
PK2L76F-100U (X,Y)100 2 ±2 240 76×76×32
PK2L130-100U (X,Y)100 2 ±2 580 130×130×30
PK2L150-100U (X,Y)100 2 ±2 420 150×150×30
PK2L150-200U (X,Y)200 5 ±5 370 150×150×30
PK2L150-300U (X,Y)300 10 ±10 240 150×150×30
PK2L280-200U (X,Y)200 5 ±5 150 280×280×28
Z axis

PKVH

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Size
[mm]
PKVH60-012U 12 1 ±1 2500 60×60×36

PKVL

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Size
[mm]
PKVL64F-100U 100 2 ±2 480 64×64×30
PKVL100-100U 100 2 ±2 480 100×100×30
PKVL84F-300U 300 10 ±10 210 84×84×30
 

 

XYZ axes

PK3H

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant
frequency
[Hz]		 Size
[mm]
PK3H130-030UA (X,Y)30,(Z)20 (X,Y,Z)1 (X,Y,Z)±1 820 130×130×30
PK3H150-050U (X,Y)50,(Z)30 (X,Y)2,(Z)1 (X,Y)±2,(Z)±1 670 150×150×30

PK3L

Model No. Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant
frequency
[Hz]		 Size
[mm]
PK3L150-100UA (X,Y)100,(Z)30 (X,Y)2,(Z)1 (X,Y)±2,(Z)±1 430 150×150×30
PK3L150-100U (X,Y)100,(Z)100 (X,Y)2,(Z)2 (X,Y)±2,(Z)±2 350 150×150×30
PK3L150-200UA (X,Y)200,(Z)100 (X,Y)5,(Z)2 (X,Y)±5,(Z)±2 280 150×150×30
PK3L150-300UA (X,Y)300,(Z)100 (X,Y)10,(Z)2 (X,Y)±10,(Z)±2 210 150×150×30