“Rotary and Tilt Stage” is a series of stages that allows for fine angle adjustment by means of piezo driving.
Although the maximum angular displacement is small, these stages have characteristics such as high-speed response and excellent position reproducibility and they are optimal for laser beam scanning, mirror and plane alignment, etc.

 

 

 

Rotation, tilt (inclination) and goniometry, etc.
 

Applications

•Laser optical axis adjustment
•Precision parallel mating
•Laser processing
•Small angle adjustment
•Tilt adjustment
•Cavity length adjustment

Line Up

For optical mirror
Model No. Deflection angle Resolution Resonant frequency
[Hz]		 Dimensions
[mm]
PT1M36-500S

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 500second
approx. 2.4mrad		 0.05second
approx. 0.24μrad		 8000 36×42×29
PT2M40-800S

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 800second
approx. 3.9mrad		 0.05second
approx. 0.24μrad		 330 40×60×45
 
Tilting / Rotary

Tilting

Model No. Deflection angle Resolution Resonant frequency
[Hz]		 Dimensions
[mm]
PT1T60-500S

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 500second
approx. 2.4mrad		 0.02second
approx. 0.10μrad		 1800 60×60×30
Rotary
Model No. Deflection angle Resolution Resonant frequency
[Hz]		 Dimensions
[mm]
PT1C60-800S

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 800second
approx. 3.9mrad		 0.05second
approx.0.24μrad		 640 60×60×20
PT1C60-1800S

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 1800second
approx. 8.7mrad		 0.2second
approx. 1.0μrad		 240 60×70×30
 
Goniometry
Model No. Deflection angle Resolution Resonant frequency
[Hz]		 Dimensions
[mm]
PT1G100-300S

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 300second
approx. 1.5mrad		 0.02second
approx. 0.10μrad		 260 100×100×30
PT1G100-500S

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 500second
approx. 2.4mrad		 0.02second
approx. 0.10μrad		 260 100×100×30

 

Inclination + Lifting
Model No. Deflection angle Resolution Resonant frequency
[Hz]		 Dimensions
[mm]
PT3V80F-400S

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 ±400second
approx.±1.9mrad
(Z)100μm		 0.02second
approx.0.10μrad
(Z)2nm		 270 80×80×32
PT3V100-800S

pt_image2.gif

 ±800second
approx. ±3.9mrad
(Z)300μm		 0.04second
approx. 0.19μrad
(Z)10nm		 230 100×100×32