Standard linear stage

Basic series of the Piezo Stages with ample lineup from single-axis type to monolithic 3 axes type.

Aperture shape stage

A series of stages with clear aperture on the center of moving table.

Rotary and Tilt stage

A series of stages that allows for fine angle adjustment by means of piezo driving.

Stages for “Objective Lens Focusing” are exclusively designed for focusing of objective lens.

A series of stage that realizes the nano-micro-processing for ultra-precision cutting.

An actuator with the piezo-electric element integrated in its elastic hinge mechanism.

The actuator can be used for fine position adjustment of components during assembly and rotation centering, etc.

New series of piezo stage with a built-in strain gauge sensor.

High-precision positioning without hysteresis and creeping is possible.

A low-noise driver to apply voltage on the Piezo Stage to drive it.