“Stage for Ultra-precision Machinery” is a stages that realizes the nano-micro-processing for ultra-precision cutting.
This can control the positioning at high rate and high accuracy for the tool cutting and work (processing object) movement.
Dust and drip proof measures, High rigidity
Dust-proof and drip-proof measures
Processing fluid and anti-mist measures are applied to the sealed structure to prevent even tiny chips from entering.
High rigidity
The main unit is made of steel in order to ensure the stability during processing. The structure is so robust that the processing accuracy is not impaired by chatter vibration, etc.
Applications
•Diamond bit feeding
•Fine cutting and grinding
•High-speed tool control, FTS
•Work positioning
•Precision metal processing
•Precision positioning of high load object
Line Up
| X axis |
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant freq. [Hz] |
Dimensions [mm] |
|---|---|---|---|---|---|
| PU1H70F-012U | 12 | 1 | ±1 | 4300 | 70×80×34 |
| PU1H80F-030U | 30 | 1 | ±1 | 2200 | 80×90×35 |
| PU1H150F-060U | 60 | 2 | ±2 | 650 | 150×150×40 |
| PU1L70F-080U | 80 | 2 | ±2 | 1000 | 70×90×32 |
| XY axes |
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant freq. [Hz] |
Dimensions [mm] |
|---|---|---|---|---|---|
| PU2H70F-030U | 30 | 1 | ±1 | 1800 | 70×100×34 |
| PU2H90F-030U | 30 | 1 | ±1 | 890 | 90×90×37 |
