“Standard Linear Stage” is a base series of the Piezo Stages with ample lineup from single-axis type to monolithic 3 axes type.
The mechanisms of each axis type are categorized into “direct-drive mechanism” and “displacement magnification mechanism.”
Direct-drive mechanism
•High rigidity
•Ultra-high resolution
•High-speed response
Displacement magnification mechanism
•Long stroke
•High resolution
•High repeatability
Applications
•Semiconductor and FPD inspection
•HDD Tester
•Laser optic alignment
•Interferometer devices
•Analytical Instruments
•Nanometer positioning
Line Up
| X axis |
Direct-drive mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PS1H25-006U | 6 | 1 | ±1 | 13000 | 25×30×16 |
| PS1H35-006U | 6 | 1 | ±1 | 9700 | 35×35×16 |
| PS1H45-012U | 12 | 1 | ±1 | 6200 | 45×45×16 |
| PS1H60F-012U | 12 | 1 | ±1 | 4100 | 60×60×20 |
| PS1H40F-020U | 20 | 1 | ±1 | 4100 | 48×60×13.5 |
| PS1H60-020U | 20 | 1 | ±1 | 3300 | 60×60×16 |
| PS1H80-030U | 30 | 1 | ±1 | 1900 | 80×80×16 |
| PS1H80F-030U | 30 | 1 | ±1 | 1900 | 80×80×20 |
Displacement magnification mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PS1L45-030U | 30 | 1 | ±1 | 1500 | 45×50×20 |
| PS1L40-050U | 50 | 2 | ±2 | 970 | 40×40×15 |
| PS1L60-060U | 60 | 2 | ±2 | 1300 | 60×70×20 |
| PS1L40-100U | 100 | 2 | ±2 | 510 | 40×45×15 |
| PS1L65-250U | 250 | 10 | ±10 | 360 | 65×65×15 |
| PS1L66-500U | 500 | 20 | ±20 | 200 | 66×66×17 |
| PS1L80-700U | 700 | 30 | ±30 | 106 | 80×80×20 |
| XY axes |
Direct-drive mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PS2H60-012U | 12/12 | 1/1 | ±1/±1 | 2000 | 60×80×25 |
| PS2H95-012U | 12/12 | 1/1 | ±1/±1 | 3800 | 95×95×25 |
| PS2H60-030U | 30/30 | 1/1 | ±1/±1 | 1600 | 60×80×30 |
| PS2H110-030U | 30/30 | 1/1 | ±1/±1 | 3400 | 110×110×25 |
Displacement magnification mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PS2L50-050U | 50/50 | 2/2 | ±2/±2 | 420 | 50×50×25 |
| PS2L92-050U | 50/50 | 2/2 | ±2/±2 | 1300 | 92×92×25 |
| PS2L100-080U | 80/80 | 2/2 | ±2/±2 | 480 | 100×100×30 |
| PS2L50-100U | 100/100 | 2/2 | ±2/±2 | 280 | 50×50×25 |
| PS2L60-250U | 250/250 | 10/10 | ±10/±10 | 120 | 60×60×26 |
| Z axis |
Direct-drive mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PSVH35-006U | 6 | 1 | ±1 | 3500 | 35×35×26 |
| PSVH45-012U | 12 | 1 | ±1 | 2600 | 45×45×36 |
| PSVH60F-012U | 12 | 1 | ±1 | 1600 | 60×60×40 |
| PSVH80F-030U | 30 | 1 | ±1 | 1200 | 80×80×60 |
Displacement magnification mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PSVL45-060U | 60 | 2 | ±2 | 570 | 45×45×32 |
| PSVL45F-100U | 100 | 2 | ±2 | 300 | 45×45×32 |
| PSVL60-100U | 100 | 2 | ±2 | 380 | 60×60×32 |
| PSVL60F-100U | 100 | 2 | ±2 | 270 | 60×60×38 |
| PSVL60F-150U | 150 | 5 | ±5 | 190 | 60×60×32 |
| PSVL80F-300U | 300 | 10 | ±10 | 180 | 80×80×38 |
| XYZ axes |
Direct-drive mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PS3H70-020UA | 20/20/12 | 1/1/1 | ±1/±1/±1 | 970 | 70×80×65 |
| PS3H120-030U | 30/30/30 | 1/1/1 | ±1/±1/±1 | 740 | 120×120×30 |
Displacement magnification mechanism
| Model No. | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PS3L100-080UA | 80/80/20 | 2/2/1 | ±2/±2/±1 | 400 | 100×100×30 |
| PS3L68-100U | 100/100/100 | 2/2/2 | ±2/±2/±2 | 250 | 68×68×40 |
