A high precision stage that can control positioning with as high resolution as 20nm in a stroke range of several tens of mm. By means of adoption of the SPPA ultrasonic motor, the stage has excellent static stability with low heat generation and friction retentivity.

Features

   •Excellent position reproducibility with built-in linear scale
   •Compatible with vacuum environment
   •Ease of control with RS232C communication
   •Less self-heating

 

Travel range and Resolution

Covering a range appropriate for optical testing and analysis and measurement instruments that require high position reproducibility.

Applications

   •High accuracy optical positioning
   •Alignment table attached with Microscope
   •X-ray/analysis and measurement instrument
   •Laser alignment

 

Line Up

 

Linear Stage

X AXIS

Model No. TS1L80-015A TS1L120-035A
Travel range 15mm 35mm
Resolution 20nm 20nm
Repeatability ±20nm ±20nm
Pitching /Yawing / Rolling 15″ / 15″ / 15″ 20″ / 20″ / 20″
Maximum travel speed 10mm/sec 10mm/sec
Load capacity 2kg 3kg
Thrust force 2N 2N
Built-in displacement sensor Linear scale Linear scale
Travel guide Cross roller guide Cross roller guide
Weight 500g 1kg
Body material(Surface treatment) Aluminum(Black alumite) Aluminum(Black alumite)


APERTURE XY AXES

Model No. TS2L180-015A
Travel range 15mm×15mm
Resolution 20nm
Repeatability ±20nm
  20″ / 20″ / 20″
Maximum travel speed 10mm/sec
Load capacity 3kg
Thrust force 2N
Built-in displacement sensor Linear scale
Travel guide Cross roller guide
Weight 3.2kg
Body material(Surface treatment) Aluminum(Black alumite)

 

Rotary Stage

Model No. TS1R150-360A
Rotation angle 360°
Resolution < 1 second
Repeatability < ±1 second
Maximum travel speed 5°/sec
Load capacity 3kg
Thrust force 0.1N･m
Built-in displacement sensor Rotary encoder
Travel guide Bearing
Weight 1.9kg
Body material(Surface treatment) Aluminum(Black alumite)